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> 제품소개 > Alignment Stage
 
Type EXYY-
015-015-
028M
EXYY-
018-018-
042M
EXYY-
025-025-
042M
EXYY-
025-025-
M10
EXYY-
030-030-
42M
EXYY-
030-030-
M10
EXYY-
035-035-
42M
EXYY-
035-035-
M10
EXYY-
040-040-
M42
EXYY-
040-040-
M10
Table
Dimension
(mm)
150X150 175X175 250X250 250X250 300X300 300X300 350X350 350X350 400X400 400X400
Stroke
[mm x mmm x °]
±7.5X
7.5X±2°
±7.5X
7.5X±2°
±15X
15X±3°
±15X
15X±3°
±15X
15X±3°
±15X
15X±3°
±20X
20X±3°
±20X
20X±3°
±20X
20X±3°
±20X
20X±3°
Ball
Screw Lead
[mm]
2 2 2 2 2 2 2 2 2 2
Repeatability
(mm)
±0.005 ±0.005 ±0.005 ±0.005 ±0.005 ±0.005 ±0.005 ±0.005 ±0.005 ±0.005
Dynamic
Payload
(kg)
30 30 50 50 50 50 50 50 50 50
Static
Payload
(kg)
100 100 200 200 200 200 200 200 200 200
Material AL6061 AL6061 AL6061 AL6061 AL6061 AL6061 AL6061 AL6061 AL6061 AL6061
Weight
(kg)
8 10 15 15 17 17 23 23 24 24
 
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